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| 21. | Room Temperature Terahertz and Frequency Combs Based on Intersubband Quantum Cascade Laser Diodes: History and Future e Manijeh Razeghi , and Quanyong Lu Manijeh Razeghi, and Quanyong Lu Room Temperature Terahertz and Frequency Combs Based on Intersubband Quantum Cascade Laser Diodes: History and Futur Photonics 2025, 12(1), 79; ...[Visit Journal] : The year 2024 marks the 30-year anniversary of the quantum cascade laser (QCL),
which is becoming the leading laser source in the mid-infrared (mid-IR) range. Since
the first demonstration, QCL has undergone tremendous development in terms of the
output power, wall plug efficiency, spectral coverage, wavelength tunability, and beam
quality. Owing to its unique intersubband transition and fast gain features, QCL possesses
strong nonlinearities that makes it an ideal platform for nonlinear photonics like terahertz
(THz) difference frequency generation and direct frequency comb generation via fourwave mixing when group velocity dispersion is engineered. The feature of broadband,
high-power, and low-phase noise of QCL combs is revolutionizing mid-IR spectroscopy
and sensing by offering a new tool measuring multi-channel molecules simultaneously
in the µs time scale. While THz QCL difference frequency generation is becoming the
only semiconductor light source covering 1–5 THz at room temperature. In this paper, we
will introduce the latest research from the Center for Quantum Devices at Northwestern
University and briefly discuss the history of QCL, recent progress, and future perspective of
QCL research, especially for QCL frequency combs, room temperature THz QCL difference
frequency generation, and major challenges facing QCL in the future.
[reprint (PDF)] |
| 21. | Imprinting of Nanoporosity in Lithium-Doped Nickel Oxide through the use of Sacrificial Zinc Oxide Nanotemplates Vinod E. Sandana, David J. Rogers, Ferechteh H. Teheran1, Philippe Bove, Ryan McClintock and Manijeh Razeghi Proc. SPIE 10105, Oxide-based Materials and Devices VIII, 101052C-- April 3, 2017 ...[Visit Journal] Methods for simultaneously increasing the conductivity and the porosity of NiO layers grown by pulsed laser deposition (PLD) were investigated in order to develop improved photocathodes for p-DSSC applications. NiO:Li (20at%) layers grown on c-Al2O3 by PLD showed a sharp drop in conductivity with increasing substrate temperature. Layers grown at room temperature were more than two orders of magnitude more conductive than undoped NiO layers but did not show evidence of any porosity in Scanning Electron Microscope (SEM) images. A new method for imposing a nanoporosity in NiO was developed based on a sacrificial template of nanostructured ZnO. SEM images and EDX spectroscopy showed that a nanoporous morphology had been imprinted in the NiO overlayer after preferential chemical etching away of the nanostructured ZnO underlayer. Beyond p-DSSC applications, this new process could represent a new paradigm for imprinting porosity in a whole range of materials. [reprint (PDF)] |
| 21. | Infrared detection from GaInAs/InP nanopillar arrays A. Gin, B. Movaghar, M. Razeghi and G.J. Brown Nanotechnology 16-- July 1, 2005 ...[Visit Journal] We report on the photoresponse from large arrays of 40 nm radius nanopillars with sensitivity in the long-wavelength infrared regime. Using photoluminescence techniques, a peak wavelength blue shift of approximately 5 meV was observed at 30 K from GaInAs/InP nanopillar structures, indicating carrier confinement effects. Responsivity measurements at 30 K indicated peak wavelength response at about 8 µm with responsivity of 420 mA/W at −2 V bias. We have also measured the noise and estimated the peak detectivity to be 3×108 cm·Hz½·W−1 at 1 V reverse bias and 30 K. A maximum internal quantum efficiency of 4.5% was derived from experiment. Both the photo and the dark transport have been successfully modeled as processes that involve direct and indirect field-assisted tunneling as well as thermionic emission. The best agreement with experiment was obtained when allowances were made for the non-uniformity of barrier widths and electric field heating of carriers above the lattice temperature. [reprint (PDF)] |
| 21. | Polarity inversion of Type-II InAs/GaSb superlattice photodiodes B.M. Nguyen, D. Hoffman, P.Y. Delaunay, M. Razeghi and V. Nathan Applied Physics Letters, Vol. 91, No. 10, p. 103503-1-- September 3, 2007 ...[Visit Journal] The authors demonstrated the realization of p-on-n Type-II InAs/GaSb superlattice photodiodes. Growth condition for high quality InAsSb layer lattice matched to GaSb was established for the use of an effective n-contact layer. By studying the effect of various GaSb capping layer thicknesses on the optical and electrical performances, an optimized thickness of 160 nm was determined. In comparison to as grown n-on-p superlattice photodiodes, this inverted design of p on n has shown similar quality. Finally, by analyzing Fabry-Perot interference fringes in the front side illuminated spectral measurement, the refractive index of the superlattice was determined to be approximately 3.8. [reprint (PDF)] |
| 21. | A lifetime of contributions to the world of semiconductors using the Czochralski invention M. Razeghi Vacuum Vol. 9934, 993406-1-- February 8, 2017 ...[Visit Journal] Over the course of my career, I have made numerous contributions related to semiconductor crystal growth and high performance optoelectronics over a vast region of the electromagnetic spectrum (ultraviolet to terahertz). In 2016 this cumulated in my receiving the Jan Czochralski Gold Medal award from the European Materials Research Society. This article is designed to provide a historical perspective and general overview of these scientific achievements, on the occasion of being honored by this award. These achievements would not have been possible without high quality crystalline substrates, and this article is written in honor of Jan Czochralski on the 100th anniversary of his important discovery. [reprint (PDF)] |
| 21. | Positive and negative luminescence in binary Type-II InAs/GaSb superlattice photodiodes D. Hoffman and M. Razeghi SPIE Conference, San Jose, CA, Vol. 6127, pp. 61271H-- January 23, 2006 ...[Visit Journal] In the present work, we show measurements of both positive and negative luminescence of binary Type-II InAs/GaSb superlattice photodiodes in the 3 to 13 μm spectral range. Through a radiometric calibration technique, we demonstrate temperature independent negative luminescence efficiencies of 45 % in the midwavelength (MWIR) sample from 220 K to 320 K without anti-reflective coating and values reaching 35 % in the long wavelength infrared (LWIR) spectrum sample. [reprint (PDF)] |
| 21. | Free-space optical communication using mid-infrared or solar-blind ultraviolet sources and detectors R. McClintock, A. Haddadi and M. Razeghi SPIE Proceedings, Vol. 8268, p. 826810-- January 22, 2012 ...[Visit Journal] Free-space optical communication is a promising solution to the “last mile” bottleneck of data networks. Conventional near infrared-based free-space optical communication systems suffer from atmospheric scattering losses and
scintillation effects which limit the performance of the data links. Using mid-infrared, we reduce the scattering and thus can improve the quality of the data links and increase their range. Because of the low scattering, the data link cannot be intercepted without a complete or partial loss in power detected by the receiver. This type of
communications provides ultra-high bandwidth and highly secure data transfer for both short and medium range data links. Quantum cascade lasers are one of the most promising sources for mid-wavelength infrared sources and Type-II
superlattice photodetectors are strong candidates for detection in this regime.
The same way that that low scattering makes mid-wavelength infrared ideal for secure free space communications,high scattering can be used for secure short-range free-space optical communications. In the solar-blind ultraviolet (<
280 nm) light is strongly scattered and absorbed. This scattering makes possible non-line-of-sight free-space optical communications. The scattering and absorption also prevent remote eavesdropping. III-Nitride based LEDs and photodetectors are ideal for non-line-of-sight free-space optical communication. [reprint (PDF)] |
| 20. | High Performance Quantum Cascade Lasers at λ ~ 6 μm M. Razeghi, S. Slivken, J. Yu, A. Evans, and J. David Microelectronics Journal, 34 (5-8)-- May 1, 2003 ...[Visit Journal] This talk will focus on the recent efforts at the Center for Quantum Devices to deliver a high average power quantum cascade laser source at λ ~6 μm. Strain-balancing is used to reduce leakage for these shorter wavelength quantum cascade lasers. Further, the effect of reducing the doping in the injector is explored relative to the threshold current density and maximum average output power. Lastly, to demonstrate more of the potential of these devices, epilayer down bonding is explored as a technique to significantly enhance device performance. [reprint (PDF)] |
| 20. | Cavity Length Effects of High-Temperature High-Power Continuous Wave Characteristics in Quantum-Cascade Lasers J.S. Yu, A. Evans, J. David, L. Doris, S. Slivken, and M. Razeghi Applied Physics Letters, 83 (25)-- December 22, 2003 ...[Visit Journal] We report the cavity-length dependent high-temperature high-power cw characteristics in λ=6 µm quantum-cascade lasers with a thick electroplated Au top contact layer. For a high-reflectivity (HR) coated 15 µm wide and 3 mm long laser, the cw operation is achieved up to 313 K (40 °C) with an output power of 17 mW. At 298 K, a very high cw output power of 213 mW is obtained for a HR coated 15 µm wide and 4 mm long laser. Thermal resistance is analyzed at temperatures above 283 K for HR coated lasers with different cavities. [reprint (PDF)] |
| 20. | 4.5 mW Operation of AlGaN-based 267 nm Deep-Ultraviolet Light-Emitting Diodes A. Yasan, R. McClintock, K. Mayes, D. Shiell, L. Gautero, S.R. Darvish, P. Kung and M. Razeghi Applied Physics Letters, 83 (23)-- December 8, 2003 ...[Visit Journal] We demonstrate 4.5 mW output power from AlGaN-based single quantum well ultraviolet light-emitting diodes at a very short wavelength of 267 nm in pulsed operation mode. The output power in continuous-wave mode reaches a value of 165 µW at an injected current of 435 mA. The measurements were done on arrays of four devices flip chip bonded to AlN submounts for thermal management. [reprint (PDF)] |
| 20. | Nickel oxide growth on Si (111), c-Al2O3 and FTO/glass by pulsed laser deposition V. E. Sandana ; D. J. Rogers ; F. Hosseini Teherani ; P. Bove ; R. McClintock ; M. Razeghi 03/07/2014-- March 7, 2014 ...[Visit Journal] NiO was grown on Si (111), c-Al2O3 and FTO/glass substrates by pulsed laser deposition (PLD). X-Ray Diffraction (XRD) and scanning electron microscope (SEM) studies revealed that layers grown on c-Al2O3 were fcc NiO with a dense morphology of cubic grains that were strongly (111) oriented along the growth direction. The relatively low ω rocking curve linewidth, of 0.12°suggests that there may have been epitaxial growth on the c-Al2O3 substrate. XRD and SEM indicated that films grown on Si (111) were also fcc NiO, with cubic grains, but that the grain orientation was random. This is consistent with the presence of an amorphous SiO2 layer at the surface of the Si substrate, which precluded epitaxial growth. NiO grown at lower temperature (200°C) on temperature-sensitive FTO/glass substrates showed no evidence of crystallinity in XRD and SEM studies. After flash annealing in air, however, peaks characteristic of randomly oriented fcc NiO appeared in the XRD scans and the surface morphology became more granular in appearance. Such layers appear promising for the development of future dye-sensitised solar cell devices based on NiO grown by PLD. [reprint (PDF)] |
| 20. | Low threshold GaInAsP/InP lasers with good temperature dependence grown by low pressure MOVPE J.-P. Hirtz, M. Razeghi, J.-P. Larivain, S. Hersee, J.-P. Duchemin Electronics Letters Volume 17, Issue 3 https://doi.org/10.1049/el:19810081-- February 1, 1981 ...[Visit Journal] Room temperature pulsed operation has been achieved in the 1.2–1.3 μm region for GaInAsP/InP lasers grown by low pressure metalorganic vapour phase epitaxy. Thresholds as low as 1.2 kA/cm2 and threshold temperature dependences of exp T/T0, with T0 up to 80 K, have been obtained. [reprint (PDF)] |
| 20. | Polarization-free GaN emitters in the ultraviolet and visible spectra via heterointegration on CMOS-compatible Si (100) C. Bayram, J. Ott, K. T. Shiu, C. W. Cheng, Y. Zhu, J. Kim, D. K. Sadana, M. Razeghi Proc. SPIE 9370, Quantum Sensing and Nanophotonic Devices XII, 93702F -- February 8, 2015 ...[Visit Journal] This work presents a new type of polarization-free GaN emitter. The unique aspect of this work is that the ultraviolet and visible emission originates from the cubic phase GaN and the cubic phase InGaN/GaN multi-quantum-wells, respectively. Conventionally, GaN emitters (e.g. light emitting diodes, laser diodes) are wurtzite phase thus strong polarization fields exist across the structure contributing to the “droop” behavior – a phenomenon defined as “the reduction in emitter efficiency as injection current increases”. The elimination of piezoelectric fields in GaN-based emitters as proposed in this work provide the potential for achieving a 100% internal efficiency and might lead to droopfree light emitting diodes. In addition, this work demonstrates co-integration of GaN emitters on cheap and scalable CMOS-compatible Si (100) substrate, which yields possibility of realizing a GaN laser diode uniquely – via forming mirrors along the naturally occurring cubic phase GaN-Si(100) cleavage planes. [reprint (PDF)] |
| 20. | Long Wavelength Type-II Photodiodes Operating at Room Temperature H. Mohseni and M. Razeghi IEEE Photonics Technology Letters 13 (5)-- May 1, 2001 ...[Visit Journal] The operation of uncooled InAs-GaSb superlattice photodiodes with a cutoff wavelength of λc=8 μm and a peak detectivity of 1.2 × 108 cm·Hz½/W at zero bias is demonstrated. The detectivity is similar to the best uncooled HgCdTe detectors and microbolometers. However, the R0A product is more than two orders of magnitude higher than HgCdTe and the device is more than four orders of magnitude faster than microbolometers. These features combined with their low 1/f noise and high uniformity make these type-II photodiodes an excellent choice for uncooled high-speed IR imaging arrays [reprint (PDF)] |
| 20. | Avalanche multiplication in AlGaN based solar-blind photodetectors R. McClintock, A. Yasan, K. Minder, P. Kung, and M. Razeghi Applied Physics Letters, 87 (24)-- December 12, 2005 ...[Visit Journal] Avalanche multiplication has been observed in solar-blind AlGaN-based p-i-n photodiodes. Upon ultraviolet illumination, the optical gain shows a soft breakdown starting at relatively low electric fields, eventually saturating without showing a Geiger mode breakdown. The devices achieve a maximum optical gain of 700 at a reverse bias of 60 V. By modeling the device, it is found that this corresponds to an electric-field strength of 1.7 MV/cm. [reprint (PDF)] |
| 20. | Sb-based infrared materials and photodetectors for the near room temperature applications J.D. Kim, E. Michel, H. Mohseni, J. Wojkowski, J.J. Lee and M. Razeghi SPIE Conference, San Jose, CA, Vol. 2999, pp. 55-- February 12, 1997 ...[Visit Journal] We report on the growth of InSb, InAsSb, and InTlSb alloys for infrared photodetector applications. The fabrication and characterization of photodetectors based on these materials are also reported. Both photoconductive and photovoltaic devices are investigated. The materials and detector structures were grown on (100) and (111)B semi-insulating GaAs and GaAs coated Si substrates by low pressure metalorganic chemical vapor deposition and solid source molecular beam epitaxy. Photoconductive detectors fabricated from InAsSb and InTlSb have been operated in the temperature range from 77 K to 300 K. The material parameters for photovoltaic device structures have been optimized through theoretical calculations based on fundamental mechanisms. InSb p-i-n photodiodes with 77 K peak responsivities approximately 103 V/W were grown on Si and (111) GaAs substrates. An InAsSb photovoltaic detector with a composition of x equals 0.85 showed photoresponse up to 13 micrometers at 300 K with a peak responsivity of 9.13 X 10-2 V/W at 8 micrometers . The RoA product of InAsSb detectors has been theoretically and experimentally analyzed. [reprint (PDF)] |
| 20. | Terahertz emitters at Center for Quantum Devices: recent advances and future trends Manijeh Razeghi Proc. SPIE 10177, Infrared Technology and Applications XLIII, 1017705-- August 23, 2018 ...[Visit Journal] This paper reviews the recent advances and future trends of terahertz (THz) emitters at CQD/NU, highlights the high-performance THz sources based on intracavity nonlinear frequency generation in mid-infrared quantum cascade lasers. Significant performance improvements of our THz sources in the power, wall plug efficiency are achieved by systematic optimizing the device's active region, waveguide, and chip bonding strategy. High THz power up to 1.9 mW and 0.014 mW for pulsed mode and continuous wave operations at room temperature are demonstrated, respectively. Even higher power and efficiency are envisioned based on enhancements in outcoupling efficiency and mid-IR performance. Our compact THz device with high power and wide tuning range is highly suitable for the imaging, sensing, spectroscopy, medical diagnosis, and many other applications. [reprint (PDF)] |
| 20. | Geiger-Mode Operation of AlGaN Avalanche Photodiodes at 255 nm Lakshay Gautam, Alexandre Guillaume Jaud, Junhee Lee, Gail J. Brown, Manijeh Razeghi Published in: IEEE Journal of Quantum Electronics ( Volume: 57, Issue: 2, April 2021) ...[Visit Journal] We report the Geiger mode operation of back-illuminated AlGaN avalanche photodiodes. The devices were fabricated on transparent AlN templates specifically for back-illumination to leverage hole-initiated multiplication. The spectral response was analyzed with a peak detection wavelength of 255 nm with an external quantum efficiency of ~14% at zero bias. Low-photon detection capabilities were demonstrated in devices with areas 25 μm×25 μm. Single photon detection efficiencies of ~5% were achieved. [reprint (PDF)] |
| 20. | Extended short-wavelength infrared nBn photodetectors based on type-II InAs/AlSb/GaSb superlattices with an AlAsSb/GaSb superlattice barrier A. Haddadi, R. Chevallier, A. Dehzangi, and M. Razeghi Applied Physics Letters 110, 101104-- March 8, 2017 ...[Visit Journal] Extended short-wavelength infrared nBn photodetectors based on type-II InAs/AlSb/GaSb superlattices on GaSb substrate have been demonstrated. An AlAsSb/GaSb H-structure superlattice design was used as the large-bandgap electron-barrier in these photodetectors. The photodetector is designed to have a 100% cut-off wavelength of ∼2.8 μm at 300 K. The photodetector exhibited a room-temperature (300 K) peak responsivity of 0.65 A/W at 1.9 μm, corresponding to a quantum efficiency of 41% at zero bias under front-side illumination, without any anti-reflection coating. With an R × A of 78 Ω·cm² and a dark current density of 8 × 10−3 A/cm² under −400 mV applied bias at 300 K, the nBn photodetector exhibited a specific detectivity of 1.51 × 1010 Jones. At 150 K, the photodetector exhibited a dark current density of 9.5 × 10−9 A/cm² and a quantum efficiency of 50%, resulting in a detectivity of 1.12 × 1013 Jones. [reprint (PDF)] |
| 20. | Continuous operation of a monolithic semiconductor terahertz source at room temperature Q. Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai, and M. Razeghi Appl. Phys. Lett. 104, 221105 (2014)-- June 3, 2014 ...[Visit Journal] We demonstrate room temperature continuous wave THz sources based on intracavity difference-frequency generation from mid-infrared quantum cascade lasers. Buried ridge, buried composite distributed-feedback waveguide with Čerenkov phase-matching scheme is used to reduce the waveguide loss and enhance the heat dissipation for continuous wave operation. Continuous emission at 3.6 THz with a side-mode suppression ratio of 20 dB and output power up to 3 μW are achieved, respectively. THz peak power is further scaled up to 1.4 mW in pulsed mode by increasing the mid-infrared power through increasing the active region doping and device area. [reprint (PDF)] |
| 20. | Multiple-band, Single-mode, High-power, Phase-locked, Mid-infrared Quantum Cascade Laser Arrays Manijeh Razeghi, Wenjia Zhou, Quanyong Lu, Donghai Wu, and Steven Slivken Imaging and Applied Optics 2018, JTh1A.2-- September 15, 2018 ...[Visit Journal] Single-mode, 16-channel, phase-locked laser arrays based on quantum cascade laser technology are demonstrated at multiple spectral bands across the mid-infrared spectrum region. High peak output power of 50W is achieved around the long-wavelength band of 7.7µm, while a side mode suppression ratio over 25dB is obtained. Far field distribution measurement result indicates a uniform phase distribution across the array output. [reprint (PDF)] |
| 20. | InSb Infrared Photodetectors on Si Substrates Grown by Molecular Beam Epitaxy E. Michel, J. Xu, J.D. Kim, I. Ferguson, and M. Razeghi IEEE Photonics Technology Letters 8 (5) pp. 673-- May 1, 1996 ...[Visit Journal] The InSb infrared photodetectors grown heteroepitaxially on Si substrates by molecular beam epitaxy (MBE) are reported. Excellent InSb material quality is obtained on 3-in Si substrates (with a GaAs predeposition) as confirmed by structural, optical, and electrical analysis. InSb infrared photodetectors on Si substrates that can operate from 77 K to room temperature have been demonstrated. The peak voltage-responsitivity at 4 μm is about 1.0×103 V/W and the corresponding Johnson-noise-limited detectivity is calculated to be 2.8×1010 cm·Hz½/W. This is the first important stage in developing InSb detector arrays or monolithic focal plane arrays (FPAs) on silicon. The development of this technology could provide a challenge to traditional hybrid FPA's in the future. [reprint (PDF)] |
| 20. | Modeling Type-II InAs/GaSb Superlattices Using Empirical Tight-Binding Method: New Aspects Y. Wei, M. Razeghi, G.J. Brown, and M.Z. Tidrow SPIE Conference, Jose, CA, Vol. 5359, pp. 301-- January 25, 2004 ...[Visit Journal] The recent advances in the experimental work on the Type-II InAs/GaSb superlattices necessitate a modeling that can handle arbitrary layer thickness as well as different types of interfaces in order to guide the superlattice design. The empirical tight-binding method (ETBM) is a very good candidate since it builds up the Hamiltonian atom by atom. There has been a lot of research work on the modeling of Type-II InAs/GaSb superlattices using the ETBM. However, different groups generate very different accuracy comparing with experimental results. We have recently identified two major aspects in the modeling: the antimony segregation and the interface effects. These two aspects turned out to be of crucial importance governing the superlattice properties, especially the bandgap. We build the superlattice Hamiltonian using antimony segregated atomic profile taking into account the interface. Our calculations agree with our experimental results within growth uncertainties. In addition we introduced the concept of GaxIn1-x type interface engineering, which will add another design freedom especially in the mid-wavelength infrared range (3~7 µm) in orderto reduce the lattice mismatch. [reprint (PDF)] |
| 20. | Modeling of Type-II InAs/GaSb Superlattices Using Empirical Tight-Binding Method and Interface Engineering Y. Wei and M. Razeghi Physical Review B, 69 (8)-- February 15, 2004 ...[Visit Journal] We report the most recent work on the modeling of type-II InAs/GaSb superlattices using the empirical tight binding method in an sp3s* basis. After taking into account the antimony segregation in the InAs layers, the modeling accuracy of the band gap has been improved. Our calculations agree with our experimental results within a certain growth uncertainty. In addition, we introduce the concept of GaxIn1-x type interface engineering in order to reduce the lattice mismatch between the superlattice and the GaSb (001) substrate to improve the overall superlattice material quality. [reprint (PDF)] |
| 20. | Low Noise Short Wavelength Infrared Avalanche Photodetector Using SB-Based Strained Layer Superlattice Arash Dehzangi, Jiakai Li, Manijeh Razeghi Photonics 2021, 8(5), 148; https://doi.org/10.3390/photonics8050148 Received: 8 March 2021 / Revised: 12 April 2021 / Accepted: 25 April 2021 / Published: 30 April 2021 ...[Visit Journal] We demonstrate low noise short wavelength infrared (SWIR) Sb-based type II superlattice (T2SL) avalanche photodiodes (APDs). The SWIR GaSb/(AlAsSb/GaSb) APD structure was designed based on impact ionization engineering and grown by molecular beam epitaxy on a GaSb substrate. At room temperature, the device exhibits a 50% cut-off wavelength of 1.74 µm. The device was revealed to have an electron-dominated avalanching mechanism with a gain value of 48 at room temperature. The electron and hole impact ionization coefficients were calculated and compared to give a better prospect of the performance of the device. Low excess noise, as characterized by a carrier ionization ratio of ~0.07, has been achieved. [reprint (PDF)] |
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