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2.  High-power, continuous-wave, phase-locked quantum cascade laser arrays emitting at 8 μm
WENJIA ZHOU,QUAN-YONG LU,DONG-HAI WU, STEVEN SLIVKEN, AND MANIJEH RAZEGHI
OPTICS EXPRESS 27, 15776-15785-- May 20, 2019 ...[Visit Journal]
We report a room-temperature eight-element phase-locked quantum cascade laser array emitting at 8 μm with a high continuous-wave power of 8.2 W and wall plug efficiency of 9.5%. The laser array operates primarily via the in-phase supermode and has single-mode emission with a side-mode suppression ratio of ~20 dB. The quantum cascade laser active region is based on a high differential gain (8.7 cm/kA) and low voltage defect (90 meV) design. A record high wall plug efficiency of 20.4% is achieved from a low loss buried ridge type single-element Fabry-Perot laser operating in pulsed mode at 20 °C. [reprint (PDF)]
 
2.  High performance monolithic, broadly tunable mid-infrared quantum cascade lasers
WENJIA Zhou, DONGHAI Wu, RYAN McCLINTOCK, STEVEN SLIVKEN, AND MANIJEH RAZEGH1
Optica 4(10), p. 1228-- October 10, 2017 ...[Visit Journal]
Mid-infrared lasers, emitting in the spectral region of 3-12 µm that contains strong characteristic vibrational tran­sitions of many important molecules, are highly desirable for spectroscopy sensing applications. High-efficiency quantum cascade lasers have been demonstrated with up to watt-level output power in the mid-infrared region. However, the wide wavelength tuning that is critical for spectroscopy applica­tions still largely relies on incorporating external gratings, which have stability issues. Here, we demonstrate a mono­lithic, broadly tunable quantum cascade laser source emitting between 6.1 and 9.2 µm through an on-chip integration of a sampled grating distributed feedback tunable laser array and a beam combiner. High peak power up to 65 mW has been obtained through a balanced high-gain active region design, efficient waveguide layout, and the development of a broad­band antireflection coating. Nearly fundamental transverse­mode operation is achieved for all emission wavelengths with a pointing stability better than 1.6 mrad (0.1 °). The demon­strated laser source opens new opportunities for mid-infrared spectroscopy. [reprint (PDF)]
 
2.  Angled cavity broad area quantum cascade lasers
Y. Bai, S. Slivken, Q.Y. Lu, N. Bandyopadhyay, and M. Razeghi
Applied Physics Letters, Vol. 100, Np. 8, p. 081106-1-- August 20, 2012 ...[Visit Journal]
Angled cavity broad area quantum cascade lasers (QCLs) are investigated with surface gratingbased distributed feedback (DFB) mechanisms. It is found that an angled cavity incorporating a one dimensional DFB with grating lines parallel to the laser facet offers the simplest solution for single mode and diffraction limited emission in the facet normal direction. A room temperature single mode QCL with the highest output power for wavelengths longer than 10 micron is demonstrated. This structure could be applied to a wide range of laser structures for power scaling along with spectral and spatial beam control. [reprint (PDF)]
 
2.  Stability of far fields in double heterostructure and multiple quantum well InAsSb/InPAsSb/InAs midinfrared lasers
H. Yi, A. Rybaltowski, J. Diaz, D. Wu, B. Lane, Y. Xiao, and M. Razeghi
Applied Physics Letters 70 (24)-- June 16, 1997 ...[Visit Journal]
Far fields in perpendicular direction to the junction are investigated in double heterostructure (DH) and multiple quantum well (MQW) midwave-infrared InAsSb/InPAsSb/InAs lasers (λ = 3.2–3.6 μm). Strong broadening of the far fields in the DH lasers was observed with increases in temperature and/or current. On the contrary, MQW lasers with otherwise identical structure exhibit very stable far fields as narrow as 23° for all the operating conditions investigated. Our experiment and theoretical modeling suggest that these different behaviors of far fields in DH and MQW lasers are attributed to the refractive index fluctuation in the InAsSb laser active region. [reprint (PDF)]
 
2.  Single-mode, high-power, midinfrared, quantum cascade laser phased arrays
Wenjia Zhou , Donghai Wu , Quan-Yong Lu, Steven Slivken & Manijeh Razeghi
Scientific Reports 8:14866-- October 5, 2018 ...[Visit Journal]
We demonstrate single-mode, 16-channel, optical phased arrays based on quantum cascade laser technology, with emission wavelengths around 4.8 μm. The integrated device consists of a distributed feedback seed section, a highly-efficient tree array multi-mode interferometer power splitter, and a 16-channel amplifier array with a 4° angled facet termination. With a single layer Y2O3 coating, the angled facet reflectivity is estimated to be less than 0.1% for suppressing amplifier self-lasing. A peak output power of 30 W is achieved with an emission spectrum narrower than 11 nm and a side mode suppression ratio over 25 dB. Far field distribution measurement result indicates a uniform phase distribution across the array output. Using the same phased array architecture, we also demonstrate single-mode 3.8 μm QCL amplifier arrays with up to 20 W output power. [reprint (PDF)]
 
2.  Stable single mode terahertz semiconductor sources at room temperature
M. Razeghi
2011 International Semiconductor Device Research Symposium, ISDRS [6135180] (2011).-- December 7, 2011 ...[Visit Journal]
Terahertz (THz) range is an area of the electromagnetic spectra which has lots of applications but it suffers from the lack of simple working devices which can emit THz radiation, such as the high performance mid-infrared (mid-IR) quantum cascade lasers (QCLs) based on InP technology. The applications for the THz can be found in astronomy and space research, biology imaging, security, industrial inspection, etc. Unlike THz QCLs based on the fundamental oscillators, which are limited to cryogenic operations, semiconductor THz sources based on nonlinear effects of mid-IR QCLs do not suffer from operating temperature limitations, because mid-IR QCLs can operate well above room temperature. THz sources based on difference frequency generation (DFG) utilize nonlinear properties of asymmetric quantum structures, such as QCL structures. [reprint (PDF)]
 
2.  High power InAsSb/InPAsSb/InAs mid-infrared lasers
A. Rybaltowski, Y. Xiao, D. Wu, B. Lane, H. Yi, H. Feng, J. Diaz, and M. Razeghi
Applied Physics Letters 71 (17)-- October 27, 1997 ...[Visit Journal]
We demonstrate high-power InAsSb/InPAsSb laser bars (λ ≈ 3.2 μm) consisting of three 100 μm-wide laser stripes of 700 μm cavity length, with peak output power up to 3 W at 90 K, and far-fields for the direction perpendicular to the junction as narrow as 12° full width half maximum. Spectra and far-field patterns of the laser bars are shown to have excellent characteristics for a wide range of operating conditions, suggesting the possibility of even higher light power emission with good beam quality. Joule heating is shown to be the major factor limiting higher power operation. [reprint (PDF)]
 
2.  Temperature dependent characteristics of λ ~ 3.8 µm room-temperature continuous-wave quantum-cascade lasers
J.S. Yu, A. Evans, S. Slivken, S.R. Darvish and M. Razeghi
Applied Physics Letters, 88 (25)-- June 19, 2006 ...[Visit Journal]
The highest-performance device displays pulsed laser action at wavelengths between 3.4 and 3.6 μm, for temperatures up to 300 K, with a low temperature (80 K) threshold current density of approximately 2.6 kA/cm2, and a characteristic temperature of T0~130 K. The shortest wavelength QCL (λ ~ 3.05 μm) has a higher threshold current density (~12 kA/cm2 at T=20 K) and operates in pulsed mode at temperatures up to 110 K. [reprint (PDF)]
 
2.  Room temperature continuous wave THz frequency comb based on quantum cascade lasers
M. Razeghi; Q. Y. Lu; F. H. Wang; D. H. Wu; S. Slivken
Proc. SPIE 11124, Terahertz Emitters, Receivers, and Applications X, 1112407-- September 6, 2019 ...[Visit Journal]
Frequency combs, spectra of phase-coherent equidistant lines, have revolutionized time and frequency metrology. The recently developed quantum cascade laser (QCL) comb has exhibits great potential with high power and broadband spectrum. However, in the terahertz (THz) range, cryogenic cooling has to be applied for THz QCL combs. We report a room temperature THz frequency comb at 3.0 THz based on difference-frequency generation from a mid-IR QCL comb. A largely detuned distributed-feedback grating is integrated into the QCL cavity to provide the single mode operation as well as enhanced spatial hole-burning effect for multimode comb operation. Multiheterodyne spectroscopy with multiple equally spaced lines by beating it with a reference Fabry-Pérot comb confirms the THz comb operation. This type of THz comb provides a new solution to chip-based high-speed high-resolution THz spectroscopy with compact size at room temperature. [reprint (PDF)]
 
2.  Recent advances in mid infrared (3-5 μm) quantum cascade lasers
Manijeh Razeghi; Neelanjan Bandyopadhyay; Yanbo Bai; Quanyong Lu; Steven Slivken
Optical Materials Express, Vol. 3, Issue 11, pp. 1872-1884 (2013)-- November 2, 2013 ...[Visit Journal]
Quantum cascade laser (QCL) is an important source of electromagnetic radiation in mid infrared region. Recent research in mid-IR QCLs has resulted in record high wallplug efficiency (WPE), high continuous wave (CW) output power, single mode operation and wide tunability. CW output power of 5.1 W with 21% WPE has been achieved at room temperature (RT). A record high WPE of 53% at 40K has been demonstrated. Operation wavelength of QCL in CW at RT has been extended to as short as 3μm. Very high peak power of 190 W has been obtained from a broad area QCL of ridge width 400μm. 2.4W RT, CW power output has been achieved from a distributed feedback (DFB) QCL. Wide tuning based on dual section sample grating DFB QCLs has resulted in individual tuning of 50cm-1 and 24 dB side mode suppression ratio with continuous wave power greater than 100 mW. [reprint (PDF)]
 
2.  High Power, Continuous-Wave, Quantum Cascade Lasers for MWIR and LWIR Applications
S. Slivken, A. Evans, J.S. Yu, S.R. Darvish and M. Razeghi
SPIE Conference, San Jose, CA, Vol. 6127, pp. 612703-- January 23, 2006 ...[Visit Journal]
Over the past several years, our group has endeavored to develop high power quantum cascade lasers for a variety of remote and high sensitivity infrared applications. The systematic optimization of laser performance has allowed for demonstration of high power, continuous-wave quantum cascade lasers operating above room temperature. Since 2002, the power levels for individual devices have jumped from 20 mW to 600 mW. Expanding on this development, we have able to demonstrate continuous wave operation at many wavelengths throughout the mid- and far-infrared spectral range, and have now achieved >100 mW output in the 4.0 to 9.5 µm range. [reprint (PDF)]
 
2.  Quantum-Cascade Lasers Operating in Continuous-Wave Mode Above 90°C at λ ~5.25 µm
A. Evans, J. Nguyen, S. Slivken, J.S. Yu, S.R. Darvish, and M. Razeghi
Applied Physics Letters 88 (5)-- January 30, 2006 ...[Visit Journal]
We report on the design and fabrication of λ~5.25 μm quantum-cascade lasers (QCLs) for very high temperature continuous-wave (CW) operation. CW operation is reported up to a maximum temperature of 90 °C (363 K). CW output power is reported in excess of 500 mW near room temperature with a low threshold current density. A finite element thermal model is used to investigate the Gth and maximum CW operating temperature of the QCLs. [reprint (PDF)]
 
2.  Toward realizing high power semiconductor terahertz laser sources at room temperature
Manijeh Razeghi
Proc. SPIE 8023, Terahertz Physics, Devices, and Systems V: Advance Applications in Industry and Defense, 802302 (May 25, 2011)-- May 25, 2011 ...[Visit Journal]
The terahertz (THz) spectral range offers promising applications in science, industry, and military. THz penetration through nonconductors (fabrics, wood, plastic) enables a more efficient way of performing security checks (for example at airports), as illegal drugs and explosives could be detected. Being a non-ionizing radiation, THz radiation is environment-friendly enabling a safer analysis environment than conventional X-ray based techniques. However, the lack of a compact room temperature THz laser source greatly hinders mass deployment of THz systems in security check points and medical centers. In the past decade, tremendous development has been made in GaAs/AlGaAs based THz Quantum Cascade Laser (QCLs), with maximum operating temperatures close to 200 K (without magnetic field). However, higher temperature operation is severely limited by a small LO-phonon energy (∼ 36 meV) in this material system. With a much larger LO-phonon energy of ∼ 90 meV, III-Nitrides are promising candidates for room temperature THz lasers. However, realizing high quality material for GaN-based intersubband devices presents a significant challenge. Advances with this approach will be presented. Alternatively, recent demonstration of InP based mid-infrared QCLs with extremely high peak power of 120 W at room temperature opens up the possibility of producing high power THz emission with difference frequency generation through two mid-infrared wavelengths. [reprint (PDF)]
 
2.  Optimizing facet coating of quantum cascade lasers for low power consumption
Y. Bai, S.R. Darvish, N. Bandyopadhyay, S. Slivken and M. Razeghi
Journal of Applied Physics, Vol. 109, No. 5, p. 053103-1-- March 1, 2011 ...[Visit Journal]
Typical high power consumption (∼10 W) of mid-infrared quantum cascade lasers (QCLs) has been a serious limitation for applications in battery powered systems. A partial high-reflection (PHR) coating technique is introduced for power downscaling with shorter cavity lengths. The PHR coating consists of a double layer dielectric of SiO2 and Ge. With this technique, a 4.6 μm QCL with an ultra low threshold power consumption of less than a watt (0.83 W) is demonstrated in room temperature continuous wave operation. At 25°C, the maximum output power and wall plug efficiency are 192 mW and 8.6%, respectively. [reprint (PDF)]
 
2.  Room-temperature continuous-wave operation of quantum-cascade lasers at λ ~ 4 µm
J.S. Yu, S.R. Darvish, A. Evans, J. Nguyen, S. Slivken, and M. Razeghi
Applied Physics Letters 88 (4)-- January 23, 2006 ...[Visit Journal]
High-power cw λ~4 μm quantum-cascade lasers (QCLs) are demonstrated. The effect of different cavity length and laser die bonding is also investigated. For a high-reflectivity-coated 11-μm-wide and 4-mm-long epilayer-down bonded QCL, cw output powers as high as 1.6 W at 80 K and 160 mW at 298 K are obtained, and the cw operation is achieved up to 313 K with 12 mW. [reprint (PDF)]
 
2.  Overview of Quantum Cascade Laser Research at the Center for Quantum Devices
S. Slivken, A. Evans, J. Nguyen, Y. Bai, P. Sung, S.R. Darvish, W. Zhang and M. Razeghi
SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 69000B-1-8.-- February 1, 2008 ...[Visit Journal]
Over the past several years, our group has endeavored to develop high power quantum cascade lasers for a variety of remote and high sensitivity infrared applications. The systematic optimization of laser performance has allowed for demonstration of high power, continuous-wave quantum cascade lasers operating above room temperature. In the past year alone, the efficiency and power of our short wavelength lasers (~4.8 µm) has doubled. In continuous wave at room temperature, we have now separately demonstrated ~10% wallplug efficiency and ~700 mW of output power. Up to now, we have been able to show that room temperature continuous wave operation with > 100 mW output power in the 3.8 < λ < 11.5 µm wavelength range is possible. [reprint (PDF)]
 
2.  Review of high power frequency comb sources based on InP From MIR to THZ at CQD
Manijeh Razeghi, Quanyong Lu, Donghai Wu, Steven Slivken
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States-- September 14, 2018 ...[Visit Journal]
We present the recent development of high performance compact frequency comb sources based on mid-infrared quantum cascade lasers. Significant performance improvements of our frequency combs with respect to the continuous wave power output, spectral bandwidth, and beatnote linewidth are achieved by systematic optimization of the device's active region, group velocity dispersion, and waveguide design. To date, we have demonstrated the most efficient, high power frequency comb operation from a free-running room temperature continuous wave (RT CW) dispersion engineered QCL at λ~5-9 μm. In terms of bandwidth, the comb covered a broad spectral range of 120 cm−1 with a radio-frequency intermode beatnote spectral linewidth of 40 Hz and a total power output of 880 mW at 8 μm and 1 W at ~5.0 μm. The developing characteristics show the potential for fast detection of various gas molecules. Furthermore, THz comb sources based on difference frequency generation in a mid-IR QCL combs could be potentially developed. [reprint (PDF)]
 
2.  Very high wall plug efficiency of quantum cascade lasers
Y. Bai, S. Slivken, S.R. Darvish, and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76080F-1-- January 22, 2010 ...[Visit Journal]
We demonstrate very high wall plug efficiency (WPE) of mid-infrared quantum cascade lasers (QCLs) in low temperature pulsed mode operation (53%), room temperature pulsed mode operation (23%), and room temperature continuous wave operation (18%). All of these values are the highest to date for any QCLs. The optimization of WPE takes the route of understanding the limiting factors of each sub-efficiency, exploring new designs to overcome the limiting factor, and constantly improving the material quality. [reprint (PDF)]
 
2.  High power quantum cascade lasers
M. Razeghi, S. Slivken, Y. Bai, B. Gokden, and S.R. Darvish
New Journal of Physics (NJP), Volume 11, p. 125017-- December 1, 2009 ...[Visit Journal]
We report the most recent state-of-art quantum cascade laser results at wavelengths around 4.8 and 10 μm. At 4.8 μm, a room temperature wall plug efficiency (WPE) of 22 and 15.5% are obtained in pulsed mode and continuous wave (cw) mode, respectively. Room temperature cw output power reaches 3.4 W. The same laser design is able to reach a WPE of 36% at 120 K in pulsed mode. At 10 μm, room temperature average power of 2.2 W and cw power of 0.62 W are obtained. We also explore lasers utilizing the photonic crystal distributed feedback mechanism, and we demonstrate up to 12 W peak power operation at three different wavelengths around 4.7 μm with a waveguide width of 100 μm and diffraction limited beam quality. [reprint (PDF)]
 
2.  High-power, room-temperature and continuous-wave operation of distributed-feedback quantum-cascade lasers at λ = 4.8 µm
J.S. Yu, S. Slivken, S.R. Darvish, A. Evans, B. Gokden and M. Razeghi
Virtual Journal of Nanoscale Science and Technology 12 (5)-- August 1, 2005 ...[Visit Journal][reprint (PDF)]
 
2.  Comparison of ultraviolet light-emitting diodes with peak emission at 340 nm grown on GaN substrate and sapphire
A. Yasan, R. McClintock, K. Mayes, S.R. Darvish, H. Zhang, P. Kung, M. Razeghi, S.K. Lee and J.Y. Han
Applied Physics Letters, 81 (12)-- September 16, 2002 ...[Visit Journal]
Based on AlInGaN/AlInGaN multiquantum wells, we compare properties of ultraviolet light-emitting diodes (LED) with peak emission at 340 nm grown on free-standing hydride vapor phase epitaxially grown GaN substrate and on sapphire. For the LED grown on GaN substrate, a differential resistance as low as 13 Ω and an output power of more than one order of magnitude higher than that of the same structure grown on sapphire are achieved. Due to higher thermal conductivity of GaN, output power of the LEDs saturates at higher injection currents compared to the devices grown on sapphire. [reprint (PDF)]
 
2.  Injector doping level dependent continuous-wave operation of InP-based QCLs at λ~ 7.3 µm above room temperature
J.S. Yu, S. Slivken, and M. Razeghi
Semiconductor Science and Technology (SST), Vol. 25, No. 12, p. 125015-- December 1, 2010 ...[Visit Journal]
We report the continuous-wave (CW) operation of InGaAs/InAlAs quantum cascade lasers (QCLs) operating at λ ~ 7.3 µm above room temperature. The injector doping level–dependent CW characteristics above room temperature are investigated for doping densities between 7 × 1016 cm−3 and 2 × 1017 cm−3. The device performance, i.e. threshold current density, output power, operating temperature and characteristic temperature, depends strongly on the injector doping density. For a relatively low injector doping density of 7 × 1016 cm−3, a high-reflectivity-coated 10 µm wide and 4 mm long laser exhibits an improved device performance with an output power of 152 mW and a threshold current density of 1.37 kA cm−2 at 298 K under CW mode, operating up to 343 K. The thermal characteristics are also analyzed by the estimation from the experimentally measured data for the QCLs with different injector doping densities. [reprint (PDF)]
 
2.  Recent performance records for mid-IR quantum cascade lasers
M. Razeghi; Y. Bai; S. Slivken; S. Kuboya; S.R. Darvish
Terahertz and Mid Infrared Radiation: Basic Research and Practical Applications, 2009. TERA-MIR International Workshop [5379656], (2009) -- November 9, 2009 ...[Visit Journal]
The wall plug efficiency of the mid-infrared quantum cascade laser in room temperature continuous wave operation is brought to 17%. Peak output power from a broad area (400 μm x 3 mm) device gives 120 W output power in pulsed mode operation at room temperature. Using a single-well-injector design, specifically made for low temperature operation, a record wall plug efficiency of 53% is demonstrated at 40 K. [reprint (PDF)]
 
2.  Recent progress of widely tunable, CW THz sources based QCLs at room temperature
Manijeh Razeghi
Terahertz Science and Technology, Vol.10, No.4, pp. 87-151-- December 7, 2017 ...[Visit Journal]
The THz spectral region is of significant interest to the scientific community, but is one of the hardest regions to access with conventional technology. A wide range of compelling new applications are initiating a new revolution in THz technology, especially with regard to the development of compact and versatile devices for THz emission and detection. In this article, recent advances with regard to III-V semiconductor optoelectronics are explored with emphasis on how these advances will lead to the next generation of THz component technology [reprint (PDF)]
 
1.  Investigation of impurities in type-II InAs/GaSb superlattices via capacitance-voltage measurement
G. Chen, A. M. Hoang, S. Bogdanov, A. Haddadi, P. R. Bijjam, B.-M. Nguyen, and M. Razeghi
Applied Physics Letters 103, 033512 (2013)-- July 17, 2013 ...[Visit Journal]
Capacitance-voltage measurement was utilized to characterize impurities in the non-intentionally doped region of Type-II InAs/GaSb superlattice p-i-n photodiodes. Ionized carrier concentration versus temperature dependence revealed the presence of a kind of defects with activation energy below 6 meV and a total concentration of low 1015 cm−3. Correlation between defect characteristics and superlattice designs was studied. The defects exhibited a p-type behavior with decreasing activation energy as the InAs thickness increased from 7 to 11 monolayers, while maintaining the GaSb thickness of 7 monolayers. With 13 monolayers of InAs, the superlattice became n-type and the activation energy deviated from the p-type trend. [reprint (PDF)]
 

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