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3.  High performance LWIR Type-II InAs/GaSb superlattice photodetectors and infrared focal plane array
Y. Wei, A. Hood, A. Gin, V. Yazdanpanah, M. Razeghi and M. Tidrow
SPIE Conference, Jose, CA, Vol. 5732, pp. 309-- January 22, 2005 ...[Visit Journal]
We report on the demonstration of a focal plane array based on Type-II InAs-GaSb superlattices grown on n-type GaSb substrate with a 50% cutoff wavelength at 10 μm. The surface leakage occurring after flip-chip bonding and underfill in the Type-II devices was suppressed using a double heterostructure design. The R0A of diodes passivated with SiO2 was 23 Ω·cm2 after underfill. A focal plane array hybridized to an Indigo readout integrated circuit demonstrated a noise equivalent temperature difference of 33 mK at 81 K, with an integration time of 0.23 ms. [reprint (PDF)]
 
3.  Surface leakage investigation via gated type-II InAs/GaSb long-wavelength infrared photodetectors
G. Chen, E.K. Huang, A.M. Hoang, S. Bogdanov, S.R. Darvish, and M. Razeghi
Applied Physics Letters, Vol. 101, No. 21, p. 213501-1-- November 19, 2012 ...[Visit Journal]
By using gating technique, surface leakage generated by SiO2 passivation in long-wavelength infrared type-II superlattice photodetector is suppressed, and different surface leakage mechanisms are disclosed. By reducing the SiO2 passivation layer thickness, the saturated gated bias is reduced to −4.5 V. At 77 K, dark current densities of gated devices are reduced by more than 2 orders of magnitude, with 3071 Ω·cm² differential-resistance-area product at −100 mV. With quantum efficiency of 50%, the 11 μm 50% cut-off gated photodiode has a specific detectivity of 7 × 1011 Jones, and the detectivity stays above 2 × 1011 Jones from 0 to −500 mV operation bias. [reprint (PDF)]
 
3.  Development of high power, InP-based quantum cascade lasers on alternative epitaxial platforms
Steven Slivken, Nirajman Shrestha, Manijeh Razeghi
Proc. of SPIE Vol. 12895, Quantum Sensing and Nano Electronics and Photonics XX, 1289503 (28 January - 1 February 2024, San Francisco) doi: 10.1117/12.3009335 ...[Visit Journal]
In this talk, challenges and solutions associated with the monolithic, epitaxial integration of mid- and longwave- infrared, InP-based quantum cascade lasers on GaAs and Si wafers will be discussed. Initial results, including room temperature, high power, and continuous wave operation, will be described. [reprint (PDF)]
 
3.  Mid-wavelength infrared high operating temperature pBn photodetectors based on type-II InAs/InAsSb superlattice
Donghai Wu, Jiakai Li, Arash Dehzangi, and Manijeh Razeghi
AIP Advances 10, 025018-- February 11, 2020 ...[Visit Journal]
A high operating temperature mid-wavelength infrared pBn photodetector based on the type-II InAs/InAsSb superlattice on a GaSb substrate has been demonstrated. At 150 K, the photodetector exhibits a peak responsivity of 1.48 A/W, corresponding to a quantum efficiency of 47% at −50 mV applied bias under front-side illumination, with a 50% cutoff wavelength of 4.4 μm. With an R×A of 12,783 Ω·cm² and a dark current density of 1.16×10−5A/cm² under −50 mV applied bias, the photodetector exhibits a specific detectivity of 7.1×1011 cm·Hz½/W. At 300 K, the photodetector exhibits a dark current density of 0.44 A/cm²and a quantum efficiency of 39%, resultingin a specific detectivity of 2.5×109 cm·Hz½/W. [reprint (PDF)]
 
3.  Novel Method for Reclaim/Reuse of Bulk GaN Substrates using Sacrifical ZnO Release Layers
A. Rajan, S. Sundaram, Y. El Gmili, P. L. Voss, K. Pantzas, T. Moudakir, A. Ougazzaden, D. J. Rogers, F. Hosseini Teherani, V. E. Sandana, P. Bove, K. Prior, R. McClintock & M. Razeghi
Proc. SPIE 8987, Oxide-based Materials and Devices V, 898719-- April 2, 2014 ...[Visit Journal]
Free-standing (0002)-oriented GaN substrates (f = 2”) were coated with 200 nm of ZnO and used as templates for the growth of GaN thin films. SEM and AFM revealed that such GaN layers had a relatively homogenous surface morphology with an RMS roughness (5 μm x 5 μm) of less than 4nm. XRD studies revealed strained ZnO growth on the GaN substrate and the reproduction of the substrate rocking curve for the GaN overlayers after only a hundred nm of growth, thus indicating that the GaN films had superior crystallographic quality compared to those grown on sapphire or ZnO/sapphire substrates. Quarter-wafer areas of GaN were removed from the GaN substrate (by selective chemical etching away of the ZnO interlayer). The expensive GaN substrates were then reclaimed/reused (without the need for polishing) for a second cycle of ZnO and GaN growth, which gave similar XRD, SEM, CL and AFM results to the first cycle. [reprint (PDF)]
 
2.  Gain-length scaling in quantum dot/quantum well infrared photodetectors
T. Yamanaka, B. Movaghar, S. Tsao, S. Kuboya, A. Myzaferi and M. Razeghi
Applied Physics Letters, Vol. 95, No. 9-- August 31, 2009 ...[Visit Journal]
The gain in quantum dot/quantum well infrared photodetectors is investigated. The scaling of the gain with device length has been analyzed, and the behavior agrees with the previously proposed model. We conclude that we understand the gain in the low bias region, but in the high field region, discrepancies remain. An extension of the gain model is presented to cover the very high electric field region. The high field data are compared to the extended model and discussed. [reprint (PDF)]
 
2.  High quantum efficiency mid-wavelength infrared type-II InAs/InAs1-xSbx superlattice photodiodes grown by metal-organic chemical vapor deposition
Donghai Wu , Quentin Durlin, Arash Dehzangi , Yiyun Zhang , and Manijeh Razeghi
Appl. Phys. Lett. 114, 011104-- January 8, 2019 ...[Visit Journal]
We report the growth and characterization of mid-wavelength infrared type-II InAs/InAs1-xSbx superlattice photodiodes on GaSb substrates grown by metal-organic chemical vapor deposition. At 150 K, the 50% cut-off wavelength is 5.0 um, the dark current density is 3.3x10−4 A/cm2 under −20mV bias, and the peak responsivity is 1.76A/W corresponding to a quantum efficiency of 55% without anti-reflection coating. A specific detectivity of 1.2x1011cmHz1/2/W is achieved at 4.0 um under −20mV bias at 150 K. [reprint (PDF)]
 
2.  Very high wall plug efficiency of quantum cascade lasers
Y. Bai, S. Slivken, S.R. Darvish, and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76080F-1-- January 22, 2010 ...[Visit Journal]
We demonstrate very high wall plug efficiency (WPE) of mid-infrared quantum cascade lasers (QCLs) in low temperature pulsed mode operation (53%), room temperature pulsed mode operation (23%), and room temperature continuous wave operation (18%). All of these values are the highest to date for any QCLs. The optimization of WPE takes the route of understanding the limiting factors of each sub-efficiency, exploring new designs to overcome the limiting factor, and constantly improving the material quality. [reprint (PDF)]
 
2.  High power, continuous wave, room temperature operation of λ ~ 3.4 μm and λ ~ 3.55 μm InP-based quantum cascade lasers
N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi
Applied Physics Letters, Vol. 100, No. 21, p. 212104-1-- May 21, 2012 ...[Visit Journal]
We report two highly strain-balanced InP-based AlInAs/GaInAs quantum cascade lasers emitting near 3.39 and 3.56 . A pulsed threshold current density of only 1.1 kA/cm² has been achieved at room temperature for both lasers with characteristic temperatures (T0) of 166  K and 152  K, respectively. The slope efficiency is also relatively temperature insensitive with characteristic temperatures (T1) of 116 K and 191  K, respectively. Continuous wave powers of 504 mW and 576 mW are obtained at room temperature, respectively. This was accomplished without buried ridge processing. [reprint (PDF)]
 
2.  Polarization-free GaN emitters in the ultraviolet and visible spectra via heterointegration on CMOS-compatible Si (100)
C. Bayram, J. Ott, K. T. Shiu, C. W. Cheng, Y. Zhu, J. Kim, D. K. Sadana, M. Razeghi
Proc. SPIE 9370, Quantum Sensing and Nanophotonic Devices XII, 93702F -- February 8, 2015 ...[Visit Journal]
This work presents a new type of polarization-free GaN emitter. The unique aspect of this work is that the ultraviolet and visible emission originates from the cubic phase GaN and the cubic phase InGaN/GaN multi-quantum-wells, respectively. Conventionally, GaN emitters (e.g. light emitting diodes, laser diodes) are wurtzite phase thus strong polarization fields exist across the structure contributing to the “droop” behavior – a phenomenon defined as “the reduction in emitter efficiency as injection current increases”. The elimination of piezoelectric fields in GaN-based emitters as proposed in this work provide the potential for achieving a 100% internal efficiency and might lead to droopfree light emitting diodes. In addition, this work demonstrates co-integration of GaN emitters on cheap and scalable CMOS-compatible Si (100) substrate, which yields possibility of realizing a GaN laser diode uniquely – via forming mirrors along the naturally occurring cubic phase GaN-Si(100) cleavage planes. [reprint (PDF)]
 
2.  Improved performance of IR photodetectors with 3D gap engineering
J. Piotrowski and M. Razeghi
Optoelectronic Integrated Circuit Materials, Physics and Devices, SPIE Conference, San Jose, CA; Proceedings, Vol. 2397-- February 6, 1995 ...[Visit Journal]
The ultimate signal-to-noise performance of the semiconductor photodetector is limited by the statistical fluctuations of the thermal generation and recombination rates in photodetector material. Cooling is an effective but impractical way of suppression of the thermal processes. The performance of uncooled detectors can be improved by minimizing the thermal generation and recombination rates and reducing the actual volume of photodetector. This can be realized in 3D heterostructure devices. In these devices, the incident radiation is absorbed in small regions of narrow gap semiconductor, buried in wide gap volume and supplied with wide gap electric contacts and radiation concentrators. The practical near room-temperature 1 - 12 μm IR heterostructure photodetectors are reported. The devices are based on variable gap Hg1-xCdxTe. The 3D heterostructures have been obtained by Isothermal Vapor Growth Epitaxy in a reusable growth system which enables in situ doping during growth with foreign impurities. Ion milling was extensively used in preparation of the devices. Monolithic optical immersion has been applied for further improvement of performance. The 3D heterostructure devices exhibit performance exceeding that of conventional photodetectors. [reprint (PDF)]
 
2.  High Power Electrically Injected Mid-Infrared Interband Lasers Grown by LP-MOCVD
B. Lane and M. Razeghi
Journal of Crystal Growth 221 (1-4)-- December 1, 2000[reprint (PDF)]
 
2.  Room temperature operation of InxGa1-xSb/InAs type-II quantum well infrared photodetectors grown by MOCVD
D. H. Wu, Y. Y. Zhang, and M. Razeghi
Applied Physics Letters 112, 111103-- March 14, 2018 ...[Visit Journal]
We demonstrate room temperature operation of In0.5Ga0.5Sb/InAs type-II quantum well photodetectors on InAs substrate grown by metal-organic chemical vapor deposition. At 300 K, the detector exhibits a dark current density of 0.12 A/cm2, peak responsivity of 0.72 A/W corresponding to a quantum efficiency of 23.3%, with calculated specific detectivity of 2.4×109 cm.Hz1/2/W at 3.81 μm. [reprint (PDF)]
 
2.  Direct growth of thick AlN layers on nanopatterned Si substrates by cantilever epitaxy
Ilkay Demir, Yoann Robin, Ryan McClintock, Sezai Elagoz, Konstantinos Zekentes, and Manijeh Razeghi
Phys. Status Solidi A, pp. 1–6-- September 30, 2016 ...[Visit Journal]
AlN layers have been grown on 200 nm period of nanopatterned Si (111) substrates by cantilever epitaxy and compared with AlN layers grown by maskless lateral epitaxial overgrowth (LEO) on micropatterned Si (111) substrates. The material quality of 5–10 µm thick AlN grown by LEO is comparable to that of much thinner layers (2 µm) grown by cantilever epitaxy on the nanopatterned substrates. Indeed, the latter exhibited root mean square (RMS) roughness of 0.65 nm and X-ray diffraction full width at half-maximum (FWHM) of 710 arcsec along the (0002) reflection and 930 arcsec along the (10̅15) reflection. The corresponding room temperature photoluminescence spectra was dominated by a sharp band edge peak. Back emission ultra violet light emitting diodes (UV LEDs) were fabricated by flip chip bonding to patterned AlN heat sinks followed by complete Si (111) substrate removal demonstrating a peak pulsed power of ∼0.7 mW at 344 nm peak emission wavelength. The demonstrated UV LEDs were fabricated on a cost effective epitaxial structure grown on the nanopatterned Si substrate with a total thickness of 3.3 µm [reprint (PDF)]
 
2.  Polarity inversion of Type-II InAs/GaSb superlattice photodiodes
B.M. Nguyen, D. Hoffman, P.Y. Delaunay, M. Razeghi and V. Nathan
Applied Physics Letters, Vol. 91, No. 10, p. 103503-1-- September 3, 2007 ...[Visit Journal]
The authors demonstrated the realization of p-on-n Type-II InAs/GaSb superlattice photodiodes. Growth condition for high quality InAsSb layer lattice matched to GaSb was established for the use of an effective n-contact layer. By studying the effect of various GaSb capping layer thicknesses on the optical and electrical performances, an optimized thickness of 160 nm was determined. In comparison to as grown n-on-p superlattice photodiodes, this inverted design of p on n has shown similar quality. Finally, by analyzing Fabry-Perot interference fringes in the front side illuminated spectral measurement, the refractive index of the superlattice was determined to be approximately 3.8. [reprint (PDF)]
 
2.  Ultraviolet Detector Materials and Devices Studied by Femtosecond Nonlinear Optical Techniques
M. Wraback, H. Shen, P. Kung, M. Razeghi, J.C. Carrano, T. Li, and J.C. Campbell
SPIE Conference, San Jose, CA, -- January 26, 2000 ...[Visit Journal]
Femtosecond nonlinear optical techniques have been employed in the study of carrier dynamics and transport in UV detector materials. Visible femtosecond pulses derived from the signal beam of a 250 kHz regenerative amplifier-pumped optical parametric amplifier were frequency doubled to obtain pulses tunable from 250 nm to 375 nm. Time-resolved reflectivity experiments indicate that the room-temperature carrier lifetime in GaN grown by double lateral epitaxial overgrowth is about 3 times longer than that of GaN grown on sapphire without benefit of this technique. The electron velocity-field characteristics and saturation velocity in GaN have been obtained form time-resolved studies of electroabsorption in a GaN p-i-n diode. The peak steady- state velocity of 1.9x107 cm/s in this device occurs at 225 kV/cm. Time-resolved transmission measurements have been used to monitor ultrafast carrier relaxation phenomena in a thin AlGaN layer with bandgap in the solar blind region of the spectrum. Excitation intensity and wavelength dependent studies of the photoinduced bleaching decays suggest that they are primarily governed by trapping in a high density of sub-bandgap defect levels. [reprint (PDF)]
 
2.  Reliable High-Power Uncoated Al-free InGaAsP/GaAs Lasers for Cost-Sensitive Optical Communication and Processing Applications
M. Razeghi
SPIE Conference, Dallas, TX, -- November 4, 1997 ...[Visit Journal]
Unlike InP-based systems for long-distance communication applications, GaAs-based optoelectronic systems mostly for local-area network, optical interconnection or optical computing are very cost-sensitive because often these optoelectronic devices constitute most of the cost for these applications and fewer users share the cost. Thus besides technical issues, the processing cost should be addressed in the selection of materials and fabrication methods. We discuss a number of major advantages of Al-free InGaAsP/GaAs lasers for these applications, such as not coating- requirement, low cost, high long-term reliability, high performance. We discuss recent preliminary results of Al- free lasers as a first step toward these optoelectronic applications. [reprint (PDF)]
 
2.  GaN, GaAlN, and AlN for use in UV Detectors for Astrophysics: An Update
P. Kung, A. Saxler, X. Zhang, D. Walker, M. Razeghi, and M. Ulmer
SPIE Photonics West '96 Photodetectors: Materials and Devices; Proceedings 2685-- January 27, 1996 ...[Visit Journal]
In SPIE Proceeding 2397 we demonstrated that there is a large payoff still to be gained by further improvements in the performance of solar blind UV detectors for astronomical purposes. We suggested that a particularly promising future technology is one based on the ability of investigators to produce high-quality films made of wide bandgap III-IV semiconductors. Here we report on significant progress we have made over the past year to fabricate and test single-pixel devices. The next step will be to measure and improve detective efficiency, measure the solar blindness over a larger dynamic range, and begin developing multiple-pixel designs. [reprint (PDF)]
 
2.  Room temperature terahertz quantum cascade laser sources with 215 μW output power through epilayer-down mounting
Q. Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai, and M. Razeghi
Appl. Phys. Lett. 103, 011101 (2013)-- July 1, 2013 ...[Visit Journal]
We report room temperature terahertz (THz) quantum cascade laser sources with high power based on difference frequency generation. The device is Čerenkov phase matched and spectrally purified with an integrated dual-period distributed-feedback grating. Symmetric current injection and epilayer-down mounting of the device onto a patterned submount are used to improve the electrical uniformity and heat removal, respectively. The epilayer-down mounting also allows for THz anti-reflective coating to enhance the THz outcoupling efficiency. Single mode emission at 3.5 THz with a side-mode suppression ratio and output power up to 30 dB and 215  μW are obtained, respectively. [reprint (PDF)]
 
2.  Current status and potential of high power mid-infrared intersubband lasers
S. Slivken, Y. Bai, B. Gokden, S.R. Darvish and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76080B-1-- January 22, 2010 ...[Visit Journal]
Some of the recent advances in high power quantum cascade laser development will be reviewed in this paper. Research areas explored include short wavelength (λ <4 µm) lasers, high performance strain-balanced heterostructures, and high power long wavelength (7< λ< 16 µm) lasers. Near λ=4.5 µm, highlights include demonstration of 18% continuous wave wallplug efficiency at room temperature, 53% pulsed wallplug efficiency at 40 K, and 120 W of peak power output from a single device at room temperature. Near λ ~10 µm, up to 0.6 W of continuous output power at room temperature has also been demonstrated, with pulsed efficiencies up to 9%. [reprint (PDF)]
 
2.  Optical Investigations of GaAs-GaInP Quantum Wells Grown on the GaAs, InP, and Si Substrates
H. Xiaoguang, M. Razeghi
Applied Physics Letters 61 (14)-- October 5, 1992 ...[Visit Journal]
We report the first photoluminescence investigation of GaAs‐Ga0.51In0.49P lattice matched multiquantum wells grown by the low pressure metalorganic chemical vapor deposition simultaneously in the same run on GaAs, Si, and InP substrates. The sharp photoluminescence peaks indicate the high quality of the samples on three different substrates. The temperature dependence of the photoluminescence indicates that the intrinsic excitonic transitions dominate at low temperature and free‐carrier recombinations at room temperature. The photoluminescence peaks of the samples grown on Si and InP substrates shift about 15 meV from the corresponding peaks of the sample grown on the GaAs substrate. Two possible interpretations are provided for the observed energy shift. One is the diffusion of In along the dislocation threads from GaInP to GaAs and another is the localized strain induced by defects and In segregations. [reprint (PDF)]
 
2.  Light People: Professor Manijeh Razeghi
Hui Wang, and Cun Yu
Light Sci Appl 13, 164 ...[Visit Journal]
Editorial The sense of light is the first sensation the human body develops. The importance of light is self-evident. However, we all know that the light we can see and perceive covers only a small section of the spectrum. Today, for Light People, we feature a researcher who is committed to exploring different spectral bands of light ranging from deep ultraviolet to terahertz waves and working on quantum semiconductor technology, Prof. Manijeh Razeghi of the Northwestern University in the United States. Known for her quick thinking and witty remarks, Prof. Razeghi is passionate about life and always kind to others. As a scientist, she does not limit her research to a single focus, instead, she works on the entire process from material selection, device design, processing, and manufacturing, all the way to product application. She has a strong passion for education, a commitment unwavered by fame or fortune. For her students, she is both a reliable source of knowledge and a motherly figure with a caring heart. She firmly believes that all things in nature can give her energy and inspiration. In science, she is a true “pioneer” in research and a “miner” of scientific discoveries. She advises young scientists to enjoy and love what they do, and turn their research into their hobby. As a female scientist, she calls on all women to realize their true value and potential. Next, let’s hear from Professor Manijeh Razeghi, a true star who radiates energy and light [reprint (PDF)]
 
2.  Hole-initiated multiplication in back-illuminated GaN avalanche photodiodes
R. McClintock, J.L. Pau, K. Minder, C. Bayram, P. Kung and M. Razeghi
Applied Physics Letters, Vol. 90 No. 14, p. 141112-1-- April 2, 2007 ...[Visit Journal]
Avalanche p-i-n photodiodes were fabricated on AlN templates for back illumination. Structures with different intrinsic layer thicknesses were tested. A critical electric field of 2.73 MV/cm was estimated from the variation of the breakdown voltage with thickness. From the device response under back and front illumination and the consequent selective injection of holes and electrons in the junction, ionization coefficients were obtained for GaN. The hole ionization coefficient was found to be higher than the electron ionization coefficient as predicted by theory. Excess multiplication noise factors were also calculated for back and front illumination, and indicated a higher noise contribution for electron injection. [reprint (PDF)]
 
2.  High Power 0.98 μm GaInAs/GaAs/GaInP Multiple Quantum Well Laser
K. Mobarhan, M. Razeghi, G. Marquebielle and E. Vassilaki
Journal of Applied Physics 72 (9)-- November 1, 1992 ...[Visit Journal]
We report the fabrication of high quality Ga0.8In0.2As/GaAs/Ga0.51In0.49P multiple quantum well laser emitting at 0.98 μm grown by low pressure metalorganic chemical vapor deposition. Continuous wave operation with output power of 500 mW per facet was achieved at room temperature for a broad area laser with 130 μm width and 300 μm cavity length. This is an unusually high value of output power for this wavelength laser in this material system. The differential quantum efficiency exceeded 75% with excellent homogeneity and uniformity. The characteristic temperature, T0 was in the range of 120–130 K. [reprint (PDF)]
 
2.  Room temperature quantum cascade lasers with 27% wall plug efficiency
Y. Bai, N. Bandyopadhyay, S. Tsao, S. Slivken and M. Razeghi
Applied Physics Letters, Vol. 98, No. 18, p. 181102-1-- May 3, 2011 ...[Visit Journal]
Using the recently proposed shallow-well design, we demonstrate InP based quantum cascade lasers (QCLs) emitting around 4.9 μm with 27% and 21% wall plug efficiencies in room temperature (298 K) pulsed and continuous wave (CW) operations, respectively. The laser core consists of 40 QCL-stages. The highest cw efficiency is obtained from a buried-ridge device with a ridge width of 8 μm and a cavity length of 5 mm. The front and back facets are antireflection and high-reflection coated, respectively. The maximum single facet cw power at room temperature amounts to 5.1 W. [reprint (PDF)]
 

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